Adsorption of Benzene on the RuO2(110) Surface

Hyeong-Seok D. Kim,Jing Yang,Yubo Qi,Andrew M. Rappe
DOI: https://doi.org/10.48550/arXiv.1612.02890
2016-12-09
Abstract:Hydrocarbon tribopolymer, a type of polymer formed due to friction between surfaces, is a major impediment to the development of micro- and nanoelectromechanical systems (MEMS/NEMS) devices for industrial application. Tribopolymer buildup can prevent MEMS and NEMS from making or breaking electrical contact. We describe the adsorption of benzene (C6H6) on the RuO2(110) surface using density functional theory. This adsorption is an important initial step in the mechanism of hydrocarbon tribopolymer layer formation on MEMS and NEMS devices. The adsorption interaction is studied by considering three oxygen coverages of RuO2(110) and all the possible adsorption sites for benzene. We find that adsorption of benzene on O-poor RuO2(110) via C-Ru bonds is stronger than adsorption on the O-rich RuO2(110) via H-O bonds. For an in-depth study of the adsorption behavior, we include the van der Waals interaction for a holistic investigation. By incorporating the thermodynamic chemical potentials into the adsorption simulations, we describe a model that can provide guidance for realistic situations.
Materials Science
What problem does this paper attempt to address?
### Problems the paper attempts to solve This paper aims to explore the adsorption behavior of benzene (C₆H₆) on the RuO₂(110) surface in order to understand the formation mechanism of the hydrocarbon tribopolymer layer in micro - electro - mechanical systems (MEMS) and nano - electro - mechanical systems (NEMS) devices. Specifically, the paper focuses on the following aspects: 1. **Study of adsorption mechanism**: Through density functional theory (DFT), the adsorption mechanism between the RuO₂(110) surface under different oxygen coverages and benzene molecules was studied. This includes considering all possible adsorption sites and analyzing the chemical bonds and physical interactions involved in the adsorption process. 2. **Influence of oxygen coverage**: The adsorption differences on the RuO₂(110) surface under oxygen - poor (O - poor) and oxygen - rich (O - rich) conditions were studied. The results show that under oxygen - poor conditions, benzene adsorbs more strongly through C - Ru bonds; while under oxygen - rich conditions, benzene adsorbs more weakly through H - O bonds. 3. **Role of van der Waals forces**: In order to study the adsorption behavior more comprehensively, van der Waals interaction correction was introduced to explain the influence of long - range interactions on the adsorption energy. 4. **Thermodynamic model**: By incorporating the thermodynamic chemical potential into the adsorption simulation, a model that can guide practical applications was constructed to predict the optimal adsorption coverage under different conditions. ### Background problems The formation of the hydrocarbon tribopolymer layer is one of the main obstacles hindering the industrial application of MEMS/NEMS devices. This tribopolymer layer will increase the electrical contact resistance, leading to electrical switching failures. Therefore, studying the adsorption behavior of gases on the contact surface is crucial for understanding the initial steps of tribopolymer layer formation. ### Research significance Through in - depth research on the adsorption behavior of benzene on the RuO₂(110) surface, theoretical basis can be provided for the development of anti - tribopolymer surfaces and useful information can be provided for future dynamic research. This is of great significance for improving the reliability and performance of MEMS/NEMS devices. ### Formula representation The calculation formula for the adsorption energy \( E_{\text{ads}} \) is as follows: \[ E_{\text{ads}} = E_{\text{slab+molecule}} - E_{\text{slab}} - E_{\text{molecule}} \] where: - \( E_{\text{ads}} \) is the adsorption energy; - \( E_{\text{slab+molecule}} \) is the total energy of the surface with benzene molecules adsorbed; - \( E_{\text{slab}} \) is the energy of the relaxed surface; - \( E_{\text{molecule}} \) is the energy of the benzene molecule. The change in Gibbs free energy \( \Delta G_{\text{ads}} \) is expressed in terms of chemical potential as: \[ \Delta G_{\text{ads}}(\Delta \mu_O, \Delta \mu_{\text{bz}}) = -\frac{1}{A} \Delta E_{\text{ads}}^{\text{O,bz@slab}} + \frac{N_O}{A} \Delta \mu_O + \frac{N_{\text{bz}}}{A} \Delta \mu_{\text{bz}} \] The chemical potentials of benzene and oxygen are given by the following formulas respectively: \[ \Delta \mu_{\text{bz}} = \mu_0^{\text{bz}} + k_B T \ln \left( \frac{p_{\text{bz}}}{p_0} \right) \] \[ \Delta \mu_O = \mu_0^O + \frac{1}{2} k_B T \ln \left( \frac{p_{O_2}}{p_0} \right) \] These formulas help researchers understand and predict the adsorption behavior of benzene on the RuO₂(110) surface under different conditions.