Atomic force microscopy reconstruction of complex-shaped chiral plasmonic nanostructures

Alexey V. Kondratov,Oleg Y. Rogov,Radmir V. Gainutdinov

DOI: https://doi.org/10.48550/arXiv.1608.04648

2016-09-08

Abstract:A significant part of the optical metamaterial phenomena has the plasmonic nature and their investigation requires very accurate knowledge of the fabricated structures shape with a focus on the periodical features. We describe a consistent approach to the shape reconstruction of the plasmonic nanostructures. This includes vertical and tilted spike AFM probes fabrication, AFM imaging and specific post-processing. We studied a complex-shaped chiral metamaterial and conclude that the described post-processing routine extends possibilities of the existing deconvolution algorithms in the case of periodical structures with known rotational symmetry, by providing valuable information about periodical features.

Mesoscale and Nanoscale Physics,Data Analysis, Statistics and Probability

What problem does this paper attempt to address?

The problem that this paper attempts to solve is the accurate shape reconstruction of chiral plasmonic nanostructures with complex shapes. Specifically, the author focuses on how to obtain high - resolution three - dimensional models of these nanostructures through atomic force microscopy (AFM) technology, especially for structures with periodic features. Since the shape of these nanostructures has a significant impact on the optical response, it is necessary to understand their geometric forms very accurately.

### Main contributions of the paper

1. **Developed a new AFM probe**:
- The author designed and fabricated vertical and tilted sharp AFM probes to improve the imaging resolution, especially to reduce blind areas in nanostructures with high aspect ratios.

2. **Proposed a detailed post - processing algorithm**:
- Through multi - step post - processing of the original AFM data, including denoising, rotation correction, unit cell averaging, etc., a high - quality 3D model of a single unit cell was finally obtained.

3. **Verified the effectiveness of the method**:
- By comparing with scanning electron microscope (SEM) images, it was proved that using tilted probes and specific post - processing algorithms can obtain more accurate nanostructure shapes.

### Key technical details

- **Probe preparation**:
- The ordinary AFM probe was sharpened using focused ion beam (FIB) technology, reducing its tip curvature radius to about 10 nanometers.
- Probes with vertical and tilted angles of about 14 degrees were fabricated.

- **Imaging technology**:
- Imaging was carried out using the NT - MDT NTEGRA Prima atomic force microscope in tapping mode.
- The vertical probe will produce blind areas in nanostructures with high aspect ratios, while the tilted probe can effectively solve this problem.

- **Post - processing algorithm**:
- The discrete Fourier transform (DFT) was used to automatically detect the rotation angle and period of the image.
- Average all unit cells and remove unit cells with large deviations.
- In order to ensure 4 - fold symmetry, average after rotating the unit cell by 90 degrees, 180 degrees and 270 degrees.
- Compensate for the mismatch on the unit cell boundary to ensure strict periodicity.

### Conclusion

By combining tilted probes, multi - directional AFM imaging and specific post - processing algorithms, the author has successfully achieved high - precision shape reconstruction of chiral plasmonic nanostructures with complex shapes. This method not only improves the imaging resolution, but also provides an accurate 3D model for subsequent theoretical research and numerical simulation.