An algebraic RF sheath model for all excitation waveforms and amplitudes, and all levels of collisionality

A.E. Elgendy,H. Hatefinia,T. Hemke,M. Shihab,A. Wollny,D. Eremin,T. Mussenbrock,R.P. Brinkmann

DOI: https://doi.org/10.48550/arXiv.1306.1664

2013-06-07

Abstract:The boundary sheath of a low temperature plasma comprises typically only a small fraction of its volume but is responsible for many aspects of the macroscopic behavior. A thorough understanding of the sheath dynamics is therefore of theoretical and practical importance. This work focusses on the so-called "algebraic" approach which strives to describe the electrical behavior of RF modulated boundary sheaths in closed analytical form, i.e., without the need to solve differential equations. A mathematically simple, analytical expression for the charge-voltage relation of a sheath is presented which holds for all excitation wave forms and amplitudes and covers all regimes from the collision-less motion at low gas pressure to the collision dominated motion at gas high pressure. A comparison with the results of self-consistent particle-in-cell simulations is also presented.

Plasma Physics,Computational Physics