Arrays of Nano-Electromechanical Biosensors Functionalized by Microcontact Printing

Sven Salomon,Thierry Leichle,Denis Dezest,Florent Seichepine,Samuel Guillon,Christophe Thibault,Christophe Vieu,Liviu Nicu

DOI: https://doi.org/10.1088/0957-4484/23/49/495501

2012-02-23

Abstract:The biofunctionalization of nanoelectromechanical structures is critical for the development of new classes of biosensors displaying improved performances and higher-level of integration. We propose a modified microcontact printing method for the functionalization and passivation of large arrays of nanocantilevers in a single, self-aligned step. Using fluorescence microscopy and resonant frequency measurements, we demonstrate (1) the bioactivity and the anti-fouling property of deposited antibodies and BSA molecules and (2) the preservation of the nanostructures' mechanical integrity.

Mesoscale and Nanoscale Physics,Other Condensed Matter

What problem does this paper attempt to address?

The problem that this paper attempts to solve is: how to achieve the bio - functionalization of large - scale nano - electro - mechanical systems (NEMS) arrays in order to develop a new generation of high - performance, highly - integrated biosensors. Specifically, the researchers proposed an improved micro - contact printing (µCP) method, which can simultaneously complete the functionalization and anti - fouling treatment of a large number of nano - cantilever arrays in a single step, thereby ensuring the mechanical integrity and bio - activity of these nanostructures in biosensing applications.

### Research Background

High - frequency nano - electro - mechanical systems (NEMS) are receiving increasing attention due to their potential application prospects, such as in the fields of computing, single - molecule detection, etc. In order to make NEMS a viable alternative to biosensors, they need to meet the following three main requirements simultaneously:
1. **High - quality Responsivity (MR, Mass Responsivity)**: Sensitive to mass changes.
2. **Low Minimum Detectable Mass (MDM, Minimum Detectable Mass)**: Able to detect extremely small mass changes.
3. **Low Response Time (RT, Response Time)**: Respond quickly.

Although theoretical studies have shown that NEMS devices can successfully achieve high - quality responsivity and low minimum detectable mass, in practice, the response time of nano - scale sensors may not reach a practical level. To solve this problem, one possible strategy is to use a single NEMS device as part of a functional array, thereby using the large capture area of the array to shorten the response time.

### Key Challenges

- **Bio - functionalization**: Fixing probe molecules to the active surface of NEMS, which is a crucial step for NEMS to be used in biological detection. For NEMS devices obtained through micro - and nano - fabrication techniques, subsequent fabrication steps may lead to the degradation or denaturation of probe molecules, so surface modification is usually required at the last stage of the fabrication process.
- **Anti - fouling treatment**: Non - reactive areas must be coated with an anti - fouling film to reduce the probability of target molecules adsorbing in non - sensitive areas, thereby achieving detection at ultra - low concentrations.

### Solution

This paper proposes an improved micro - contact printing (µCP) method, which can simultaneously complete the functionalization and anti - fouling treatment of nano - cantilever arrays in a single step. The specific steps include:
1. **PDMS Stamp Preparation and Ink Loading**: Use a PDMS stamp, load probe molecules (such as antibodies) at the bottom of its grooves, and load anti - fouling molecules (such as BSA) on the top of the stamp.
2. **Cleaning Step**: Remove the probe molecules on the top of the stamp by contacting a clean glass slide multiple times to ensure that only the molecules in the grooves are transferred.
3. **Printing Process**: Align the stamp with the chip and apply pressure so that the bottom of the grooves contacts the nanostructures, thereby achieving the transfer of probe molecules; at the same time, the top of the stamp contacts the non - reactive area and deposits anti - fouling molecules.

### Experimental Verification

The researchers verified the following points through fluorescence microscopy and resonance frequency measurement:
1. **Bio - activity**: The deposited antibodies maintained their bio - activity.
2. **Anti - fouling Performance**: The BSA layer effectively prevented non - specific adsorption.
3. **Mechanical Integrity**: The nanostructures were not damaged during the functionalization and incubation processes and could still vibrate normally.

### Conclusion

This research demonstrates an efficient and reliable method that can achieve the functionalization and anti - fouling treatment of large - scale nano - cantilever arrays in a single step, laying the foundation for the future development of high - performance biological NEMS sensors.