Abstract:A new ultrafast laser waveguide writing method (SPIM‐WG) is extensively studied by taking advantage of phase aberrations. Adopting energy‐relocated focus, the method is capable to create photonic chips in glass with high precision, while achieving high refractive index contrasts (0.009 to 0.021) and high scanning speeds (20 mm s−1 or higher) at the same time. Integrated photonic chips have significant potential in telecommunications, classic computing, quantum systems, and topological photonics. Direct laser writing offers unique capability for creating three‐dimensional photonic devices in an optical glass chip with quick prototyping. However, it is a challenge for existing laser writing schemes to create index‐modified structures in glass that precisely match the laser focal shape while also achieving high refractive index contrasts and high scanning speeds. Here, we introduce a refractive index modification scheme that combines the advantages of non‐thermal and thermal regime fabrication methods. We also propose a waveguide formation model that is verified through a thorough study on the effects of phase aberrations. The presented new photonic chip fabrication scheme uses a novel focal intensity distribution, where pulse energy is relocated to the bottom of a laser focus by manipulating primary and higher order spherical aberrations. The technique can produce index modifications with high scanning speed (can be 20 mm/s or higher), high index contrast (ranging from 0.009 to 0.021), and high precision to fabricate with arbitrary cross‐sections. This method has potential to expand the capabilities of photonic chips in applications that require small‐scale, high precision, or high contrast refractive index control.

Three-dimensional imaging of direct-written photonic structures

High Throughput Laser Nano Direct Writing Technique

Multi-focal multi-photon microscopy for fast parallel direct laser writing

Luminescence confocal microscopy of 3D components of photonic integrated circuits fabricated by two-photon photopolymerization

Three-Dimensional Opto-Fluidic Devices Fabricated by Ultrashort Laser Pulses for High Throughput Single Cell Detection and Processing

Development of a 3D ultrafast laser written near-infrared spectro-interferometer

Three Dimensional Micro-Mechanical And Micro-Optical Devices Fabricated By Holographic Two-Photon Lithography

Investigation of ultrafast laser photonic material interactions: challenges for directly written glass photonics

Femtosecond laser micromachining and microfabrication in transparent materials

Femtosecond Microfabrication of Optical Memory and Photonic Crystals.

Diagnostics and characterization of photonic circuits by wide-field spatio-temporal imaging

Fast, Precise, High Contrast Laser Writing for Photonic Chips with Phase Aberrations

Three-dimensional Imaging of Microstructures by an Improved Compact Digital Holographic Microscope (ICDHM) with Dual Wavelength

Single-pulse Writing of a Concave Microlens Array.

Three-Dimensional Nanolithography with Visible Continuous Wave Laser Through Triplet Up-Conversion.

Imaging/nonimaging microoptical elements and stereoscopic systems based on femtosecond laser direct writing

Super-Resolution Imaging with Direct Laser Writing-Printed Microstructures.

Microfabrication by Femtosecond Laser Irradiation

Femtosecond Laser Nano/microfabrication Via Three-Dimensional Focal Field Engineering

Adaptive optical third-harmonic generation microscopy for in vivo imaging of tissues

Femtosecond laser 3D fabrication of whispering-gallery-mode microcavities