Towards high-performance linear piezoelectrics: Enhancing the piezoelectric response of zinc oxide thin films through epitaxial growth on flexible substrates

Yongkuan Li,Jincong Feng,Jintong Zhang,Baitong He,Yue Wu,Yue Zhao,Congkang Xu,Jiangyong Wang

DOI: https://doi.org/10.1016/j.apsusc.2021.149798

IF: 6.7

2021-08-01

Applied Surface Science

Abstract:<p>Ferroelectrics are popular for sensors, actuators and transduces. However, the energy barrier for reversing the polarization leads to extra energy losses, while the hysteresis causes phase-lags and non-linearities between input and output signals. The high piezoelectric constants of ferroelectrics dictate the figure-of-merit of piezoelectric devices. Enhancing the piezoelectric constant of linear-piezoelectrics potentially leads to next-generation piezoelectric devices free from issues associated with ferroelectrics. By epitaxial growth of undoped ZnO films on flexible Hastelloy substrates, we demonstrated an ∼85% improvement in the piezoelectric constant, and more importantly maintained the linearity of the piezoelectric response. Strong out-of-plane and in-plane crystallographic alignments are detected in the epitaxial sample, yet modeling of the effective thin-film piezoelectric constant shows only a limited contribution of the optimized textures. The improvement in the piezoelectric response is ascribed mostly to the in-plane epitaxial strain resulted from the lattice mismatch of ZnO to the substrate. The epitaxial ZnO film on Hastelloy promisingly offer high-precision positioners with nano-/pico-meter resolutions. Enhancing the piezoelectric constant by stain engineering potentially removes the barrier for applications of linear-piezoelectrics and enriches the piezoelectric research community.</p>

chemistry, physical,physics, applied, condensed matter,materials science, coatings & films