Improving optical thickness monitoring by including systematic and process-influenced transmittance deviations: publisher's note

Cristina Kapler
DOI: https://doi.org/10.1364/ao.537478
IF: 1.9
2024-07-26
Applied Optics
Abstract:Stefan Bruns, Philipp Farr, Thomas Melzig, Jorg Terhurne, Michael Vergohl This publisher's note reports corrections in Appl. Opt.62, B141 (2023)APOPAI0003-693510.1364/AO.475076. [Appl. Opt. 63, 5940-5940 (2024)]
optics
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