Abstract:A seamless chip-to-world photonic interface enables wide-ranging advancements in optical ranging, display, communication, computation, imaging, and light-matter interaction. An optimal solution allows for 2D scanning of a diffraction-limited beam from anywhere on a photonic chip over a large number of beam-spots in free-space. Currently, devices with direct PIC integration rely on tiled apertures with poor mode qualities, large footprints, and complex control systems. Micro-mechanical beam scanners have good beam quality but lack direct PIC integration and are inertially-limited due to the use of bulk optical components or structures in which the optical aperture and actuator sizes are inextricably linked, resulting in trade-offs among resolution, speed, and footprint. Here, we overcome these limitations with the photonic "ski-jump": a nanoscale optical waveguide monolithically integrated atop a piezoelectrically actuated cantilever which passively curls ~90$^{\circ}$ out-of-plane in a footprint of <0.1 mm$^{2}$, emits sub-micron diffraction-limited optical modes, and exhibits kHz-rate mechanical resonances with quality factors exceeding 10,000. This enables two-dimensional beam-scanning with footprint-adjusted spot-rates of 68.6 mega-spots/(s$\cdot$mm$^{2}$) at CMOS-level voltages, which is equivalent to a 1 megapixel display at 100 Hz from a 1.5 mm$^{2}$ footprint, and exceeds the performance of state-of-the-art MEMS mirrors by >50$\times$. Using this device, we demonstrate image projection, video projection, and the initialization and readout of single photons from silicon vacancy centers in diamond waveguides. Based on current performance, we identify pathways for achieving >1 giga-spots at kHz-rates in a ~1 cm$^{2}$ area to provide a seamless, scalable optical pipeline between integrated photonic processors and the free-space world.

The light-well: A tuneable free-electron light source on a chip

On-Chip Integration of Optical Nanofibers and Nanowires

Electro-optic tuning of a single-frequency ultranarrow linewidth microdisk laser

Tunable Ultra‐Narrow Linewidth Light Source Through Liquid Crystal‐Assisted Mini‐Bound‐States‐In‐Continuum Cavities

Enhanced photon emission from free electron excitation of a nanowell

Transverse Sum-Frequency Generation In Single Semiconductor Nanowires

Enhancement of the Monolayer Tungsten Disulfide Exciton Photoluminescence with a Two-Dimensional Material/Air/Gallium Phosphide In-Plane Microcavity.

Tuning Electroluminescence from a Plasmonic Cavity-Coupled Silicon Light Source

The Light Source, Optical Waveguide and Light Enhancement of Nano-Integrated Optical Circuit

Fiber-Integrated Reversibly Wavelength-Tunable Nanowire Laser Based on Nanocavity Mode Coupling.

Single-electron Nano-chip Free-electron Laser

Generating a Sub-Nanometer-confined Optical Field in a Nanoslit Waveguiding Mode

Holographic free-electron light source

Ultracompact and Unidirectional On-Chip Light Source Based on Epsilon-Near-Zero Materials in an Optical Communication Range

On-Chip Nanoscale Light Sources

Waveguide-integrated electroluminescent carbon nanotubes

Nanophotonic waveguide chip-to-free-space beam scanning at 68 Million Spots/(s$\cdot$mm$^{2}$)

Spinning light on the nanoscale.

Single-photon Emission from an Acoustically-driven Lateral Light-emitting Diode

A tunable photo-electric co-excited point electron source: low-intensity excitation emission and structure-modulated spectrum-selection

Nanoscale Octave-spanning Coherent Light Generation